JEOL JSM-6300
Location: Holder building 154.00.21
Telephone extension: 73668
This instrument is run by the EM Facility.
The JEOL 6300 was installed in 1992, initially for the development of diffraction imaging methods.
It currently has a tungsten filament but can be operated with LaB6. The microscope operates between 1.0 and 30 kV.
Using secondary electron imaging, the best resolution attainable on high contrast samples (Au on C) is ~6 nm at 30 kV.
Facilities available on this instrument include:
* Conventional secondary electron imaging of surface topography.
* Back scattered electron imaging with annular detector, for compositional contrast and channelling contrast imaging.
* Oxford Instruments INCA EDX system
* Digital image capture to PC via Oxford Instruments INCA system.
* Automated EBSD (electron back scatter diffraction) analysis for crystal orientation measurement and phase identification with EDAX-TSL EBSD system.