Zeiss Merlin - Analytical

Location: Holder building room 154.00.11

Contact: Dr. Phani Karamched

The Carl Zeiss Merlin is a high resolution field emission gun SEM with analytical capabilities. The system is fitted with a number of detectors for imaging including: Everhart Thornley, in lens secondary and in column energy selective backscattered (ESB) electron and STEM dectectors. Analytical capability is provided by an Oxford Instruments XMax 150mm² for obtaining high resolution spectra and high spatial resolution maps.

The instrument also has a facility for local charge compensation and electron beam assisted cleaning. The system is fitted with a plasma cleaner for chamber and sample cleanliness. 

• Operating voltages  20V -> 30kV, upto 40nA beam current
• Resolution 0.8nm @15kV, 1.6nm@1kV
• Inlens SE and energy selective backscatter detectors.
• Four quadrant backscattered electron detector
• Fitted with Zeiss A-STEM detector
• Charge compensation device for working on insulating specimens without the need for coating or low vacuum.
• Oxford instruments Xmax 150 EDX for ‘routine’ analysis and mapping of a wide variety of specimens, aimed at working at low energies for higher resolutions.
• In collaboration with Oxford Instruments  - Developmental windowless detector for low enengy X ray analysis and mapping of Li compound.
• Fitted with a Gatan cryo stage and cryo / vacuum transfer capability and a customised Gatan Ilion II system with customised iload system.