Zeiss Merlin - EBSD

Location: Holder building room 154.00.11

Contact: Dr Phani Karamched

The Carl Zeiss Merln is an FEG SEM fitted with a Bruker EBSD system and plasma cleaner. The system is particulalry good for high resolution SEM imaging and high resolution EBSD patterning. 

• Operating voltages  20V -> 30kV, upto 40nA beam current
• Resolution 0.8nm @15kV, 1.6nm@1kV
• Inlens SE and energy selective backscatter detectors.
• Angular selective backscatter detector for crystallographic contrast
• Bruker Quantax EBSD system and eFlash camera and forward scattered electron detectors