Zeiss Merlin - EBSD

Location: Holder building room 154.00.11

Telephone: 73685.

Contact: Jennifer Holter

The Carl Zeiss Merln is an FEG SEM fitted with a Bruker EBSD system and plasma cleaner. The system is particulalry good for high resolution SEM imaging and high resolution EBSD patterning. 

  • Operating voltages  20V -> 30kV, upto 40nA beam current
  • Resolution 0.8nm @15kV, 1.6nm@1kV
  • Inlens SE and energy selective backscatter detectors.
  • Angular selective backscatter detector for crystallographic contrast
  • Bruker Quantax EBSD system and eFlash camera and forward scattered electron detectors